INTERNATIONAL PATENT: L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE, AMERICAN AIR LIQUIDE, INC. FILES APPLICATION FOR "CRYOGENIC ETCHING USING SOF2 AND ITS FAMILY"

GENEVA, Dec. 16 -- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE (75 Quai D'orsay75007 Paris), AMERICAN AIR LIQUIDE, INC. (4640 Landing ParkwayFremont, CA 94538) filed a patent application (PCT/US2025/030770) for "CRYOGENIC ETCHING USING SOF2 AND ITS FAMILY" on May 23, 2025. With publication no. WO/2025/254850, the details related to the patent application was published on Dec 11, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): NGUYEN, Phong (200 GBC Dr.Newark, DE 19702), STAFFORD, Nathan (200 GBC Dr.Newark, DE 19702), PALLEM, Venkateswara, R. (200...