INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "USE OF MULTIPLE ELECTRON BEAMS FOR HIGH THROUGHPUT INSPECTION"

GENEVA, Sept. 10 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/017468) for "USE OF MULTIPLE ELECTRON BEAMS FOR HIGH THROUGHPUT INSPECTION" on Feb 27, 2025. With publication no. WO/2025/184259, the details related to the patent application was published on Sep 04, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): JIANG, Xinrong (2651 South CourtPalo Alto, California 94306), JIANG, Youfei (905 West Middlefield Rd.Apt. 909Mountain View, California 94043), SHRIYAN, Sameet (237 Wild Rose WayMilpitas, California 95035)

Abstract: A telec...