GENEVA, Sept. 10 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/017266) for "THREE-AXIS TUNED MASS DAMPER FOR TURBO MOLECULAR PUMP" on Feb 25, 2025. With publication no. WO/2025/184124, the details related to the patent application was published on Sep 04, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): ABUHAMDIA, Tariq Maysarah Ahmed (2063 Stonewook LaneSan Jose, California 95132), LIN, Reynold (Wei-Tse) (Rm. 7, 8F., No. 159, Aikou 6th St.,Hsinchu CountyZhubei, 302053)

Abstract: A mass damper is connected to a vacuum pump to red...