INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "SYSTEMS AND METHODS OF SEM INSPECTION USING SELECTIVE SCAN APPROACH"

GENEVA, Aug. 19 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/013671) for "SYSTEMS AND METHODS OF SEM INSPECTION USING SELECTIVE SCAN APPROACH" on Jan 30, 2025. With publication no. WO/2025/170811, the details related to the patent application was published on Aug 14, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SRINIVASAN, Balaji (141, CTH RoadTiruninravurChennai 602024), HUANG, Weijie (47370 Havasu StreetFremont, California 94539), SINHA, Harsh (975 Cadet PlaceSan Jose, California 95133)

Abstract: The system includes an ele...