INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "SYSTEMS AND METHODS FOR EX-SITU BAKEOUT OF DIFFERENTIALLY PUMPED VACUUM CHAMBERS"

GENEVA, Nov. 11 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/025503) for "SYSTEMS AND METHODS FOR EX-SITU BAKEOUT OF DIFFERENTIALLY PUMPED VACUUM CHAMBERS" on Apr 21, 2025. With publication no. WO/2025/230751, the details related to the patent application was published on Nov 06, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): PETRONE, Nicholas (1821 Harmil WaySan Jose, California 95125), MURAY, Lawrence (4011 Paseo GrandeMoraga, California 94556)

Abstract: The system includes a high vacuum chamber, a bakeout chamber, and an ultr...