GENEVA, June 18 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2024/056435) for "SYSTEM AND METHOD FOR OVERLAY METROLOGY USING A PHASE MASK" on Nov 18, 2024. With publication no. WO/2025/122331, the details related to the patent application was published on Jun 12, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): GALON, Iftach (3 PEKAN ST30095 RAMAT-YISHAY), GDOR, Itay (317 Bait Halevi4287000 Halevi), LUBASHEVSKY, Yuval (22 Smolenskin Street3436606 Haifa), WEISS, Yaniv (One Technology DriveMilpitas, California 95035), REDDY, Nireekshan (O...