GENEVA, Oct. 1 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/019470) for "SYSTEM AND METHOD FOR DEVICE-LIKE OVERLAY TARGETS MEASUREMENT" on Mar 12, 2025. With publication no. WO/2025/198904, the details related to the patent application was published on Sep 25, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): LEVINSKI, Vladimir (Hermon 923100 Migdal HaEmek), REDDY, Nireekshan, K (HA' YARKON - 296/46350432 Tel Aviv)
Abstract: A method may include illuminating an overlay target of a sample with one or more broadband illumination beam...