INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "STRESS CONTROL OF THINNED EPITAXIAL SILICON DEVICES AND MEMS STRUCTURES"

GENEVA, Jan. 20 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/037051) for "STRESS CONTROL OF THINNED EPITAXIAL SILICON DEVICES AND MEMS STRUCTURES" on Jul 10, 2025. With publication no. WO/2026/015681, the details related to the patent application was published on Jan 15, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BROWN, David Lee (120 Wooded View DriveLos Gatos, California 95032), CHERN, Jehn-Huar Howard (16921 Grapevine CourtMorgan Hill, California 95037)

Abstract: A workpiece includes a doped p-type substrate, a co-doped P...