INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "SPATIALLY-VARYING SPECTRAL METROLOGY FOR LOCAL VARIATION DETECTION"

GENEVA, Feb. 18 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2024/041408) for "SPATIALLY-VARYING SPECTRAL METROLOGY FOR LOCAL VARIATION DETECTION" on Aug 08, 2024. With publication no. WO/2025/034939, the details related to the patent application was published on Feb 13, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): TAN, Zhengquan (20306 Clifden WayCupertino, California 95014), CHOUAIB, Houssam (2112 Mesa Verde DriveMilpitas, California 95035)

Abstract: A metrology system may include a light source to generate an illumination beam...