INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "SINGLE WAFER ORIENTATION TOOL-INDUCED SHIFT CLEANING"

GENEVA, May 6 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2024/052199) for "SINGLE WAFER ORIENTATION TOOL-INDUCED SHIFT CLEANING" on Oct 21, 2024. With publication no. WO/2025/090404, the details related to the patent application was published on May 01, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MANASSEN, Amnon (10 Golda Meir Street34892 Haifa), PAQUET, Peter (2874 Barclay WayAnn Arbor, Michigan 48105), WU, Yingpin (9F.-2, No.8, Park St., Nangang Dist.Taipei, 115), YEH, Fang-Jyun (No. 21, Ln. 242, Yangguang 3rd Rd.Shanhua Dist.T...