INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "SCANNING DIFFRACTION-BASED OVERLAY SCATTEROMETRY"

GENEVA, Jan. 6 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/034863) for "SCANNING DIFFRACTION-BASED OVERLAY SCATTEROMETRY" on Jun 24, 2025. With publication no. WO/2026/006201, the details related to the patent application was published on Jan 02, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): VOLFMAN, Alon Alexander (Hanesiim St 12/1023024 Migdal Haemek), GDOR, Itay (317 Bait Halevi4287000 Tel-Aviv), GALON, Iftach (3 Pekat Street30095 Ramat-Yishay), KOPRIVICA, David (Shraga Refaeli 18, Flat 49Petah Tikva, 4906421), VAKNIN, Yonat...