INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "SCANNING DIFFRACTION BASED OVERLAY SCATTEROMETRY"

GENEVA, Oct. 6 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/019481) for "SCANNING DIFFRACTION BASED OVERLAY SCATTEROMETRY" on Mar 12, 2025. With publication no. WO/2025/207314, the details related to the patent application was published on Oct 02, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): GDOR, Itay (317 Bait Halevi42870 Tel-Aviv), LUBASHEVSKY, Yuval (22 Smolenskin St.3436606 Haifa), LEVINSKI, Vladimir (Hermon 923100 Migdal HaEmek), NEGRI, Daria (Ha'Alon 38/136811 Nesher), ISAKOVITCH, Nickolai (317 bait halevi42870 Tel-Aviv)...