INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "REDUCED FLUCTUATIONS AND INCREASED BRIGHTNESS UNIFORMITY OF LASER SUSTAINED PLASMA SOURCES"

GENEVA, Aug. 19 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/013477) for "REDUCED FLUCTUATIONS AND INCREASED BRIGHTNESS UNIFORMITY OF LASER SUSTAINED PLASMA SOURCES" on Jan 29, 2025. With publication no. WO/2025/170799, the details related to the patent application was published on Aug 14, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BATHEJA, Deepak Kumar (2991 Leslie Park Cir.Ann Arbor, Michigan 48105), ESFANDYARPOUR, Vahid (2591 La Mirada Dr.San Jose, California 95125), FIELDEN, John (2020 Victoria Ct.Los Altos, California 94...