INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "PROCESS CONDITION MEASUREMENT DEVICE INCLUDING THERMALLY ISOLATED ELECTRONIC MODULES"

GENEVA, July 30 -- KLA CORPORATION (One Technology DriveMilpitas, CA 95035) filed a patent application (PCT/US2025/010655) for "PROCESS CONDITION MEASUREMENT DEVICE INCLUDING THERMALLY ISOLATED ELECTRONIC MODULES" on Jan 08, 2025. With publication no. WO/2025/155457, the details related to the patent application was published on Jul 24, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): QULI, Farhat, A. (6065 Monte Verde CourtCastro Valley, CA 94552), MAHZOON, Razieh (27783 La Porte Ave.Hayward, CA 94545)

Abstract: An instrumented wafer assembly for process condition monitoring is disclosed....