INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "OFF-AXIS THROUGH THE LENS MUTUALLY COHERENT DARK FIELD IMAGING SYSTEM WITH INCOHERENT LIGHT FOR OVERLAY METROLOGY"

GENEVA, Sept. 3 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/016697) for "OFF-AXIS THROUGH THE LENS MUTUALLY COHERENT DARK FIELD IMAGING SYSTEM WITH INCOHERENT LIGHT FOR OVERLAY METROLOGY" on Feb 21, 2025. With publication no. WO/2025/179084, the details related to the patent application was published on Aug 28, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): CAI, Wenjian (1228 Henderson Avenue #3Sunnyvale, California 94086), HILL, Andrew V. (57399 Lake Aspen Ln.Sunriver, Oregon 97707), LIU, Xuefeng (1092 Prouty WySan Jose, Califo...