INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "MULTI-SPOT LASER-SUSTAINED PLASMA LIGHT SOURCE"

GENEVA, Jan. 13 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/035828) for "MULTI-SPOT LASER-SUSTAINED PLASMA LIGHT SOURCE" on Jun 30, 2025. With publication no. WO/2026/010835, the details related to the patent application was published on Jan 08, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BUETTNER, Alexander (Hermann-Mehl Str. 435781 Weilburg), ESFANDYARPOUR, Vahid (2591 La Mirada Dr.San Jose, California 95125), MUELLER, Tobias (Kubacher Weg 435781 Weilburg)

Abstract: The LSP broadband light source may include a pump source ...