INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "MULTI-AZIMUTH ILLUMINATION AND IMAGING INSPECTION SYSTEM AND METHOD"

GENEVA, Nov. 25 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/029667) for "MULTI-AZIMUTH ILLUMINATION AND IMAGING INSPECTION SYSTEM AND METHOD" on May 16, 2025. With publication no. WO/2025/240806, the details related to the patent application was published on Nov 20, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): WHITESIDE, Bret (591 Birdsong St.Gilroy, California 95020), HUANG, Chongyuan (34575 Falls TerraceFremont, California 94555), XU, Zhiwei (1780 Laurentian WySunnyvale, California 94087), GUI, Guan (2166 Vista Del MarSan Ma...