GENEVA, April 21 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2024/050152) for "MONITORING OF HF IN BUFFERED HYDROFLUORIC ACID (BHF)" on Oct 07, 2024. With publication no. WO/2025/080511, the details related to the patent application was published on Apr 17, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): WANG, Jingjing (11 Orchard LaneLivingston, New Jersey 07039), SAITTA, Patrick (550 West 45th St., Apt 918New York, New York 10036), SHALYT, Eugene (220 Pond TerraceWashington Township, New Jersey 07676)
Abstract:
The disclosed subj...