INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "METROLOGY USING REFERENCE-BASED SYNTHETIC SPECTRA"

GENEVA, Dec. 16 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/013915) for "METROLOGY USING REFERENCE-BASED SYNTHETIC SPECTRA" on Jan 30, 2025. With publication no. WO/2025/254697, the details related to the patent application was published on Dec 11, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): CHOUAIB, Houssam (1195 Peidmont Rd.San Jose, California 95132)

Abstract: A metrology system may implement a metrology recipe by generating a real training dataset for a metrology measurement, generating a synthetic training dataset for t...