GENEVA, Oct. 20 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/022398) for "METHODS FOR MEASUREMENT OF rAIM" on Apr 01, 2025. With publication no. WO/2025/216912, the details related to the patent application was published on Oct 16, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): FELER, Yoel (Haviva Reich 39/123254107 Haifa)
Abstract: An overlay metrology system may receive an image of an overlay target on a sample in accordance with a metrology recipe, wherein the image is generated by illuminating via oblique illumination an ove...