INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "METHODS AND SYSTEMS FOR SPECTRAL MEASUREMENTS BASED ON PERTURBED SPECTRA"

GENEVA, April 30 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2024/051474) for "METHODS AND SYSTEMS FOR SPECTRAL MEASUREMENTS BASED ON PERTURBED SPECTRA" on Oct 16, 2024. With publication no. WO/2025/085462, the details related to the patent application was published on Apr 24, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): KRISHNAN, Shankar (10723 Pebble PlaceCupertino, California 95014)

Abstract: Methods and systems for measuring structural parameters characterizing a measurement target based on changes in measurement signal valu...