INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "METHODS AND SYSTEMS FOR MEASUREMENT OF SEMICONDUCTOR STRUCTURES WITH MECHANICAL STRESS MODULATION"

GENEVA, Dec. 10 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/031289) for "METHODS AND SYSTEMS FOR MEASUREMENT OF SEMICONDUCTOR STRUCTURES WITH MECHANICAL STRESS MODULATION" on May 29, 2025. With publication no. WO/2025/250711, the details related to the patent application was published on Dec 04, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): CHOUAIB, Houssam (2112 Mesa Verde DriveMilpitas, California 95035)

Abstract: Methods and systems measuring structural parameters characterizing a measurement target based on change in measu...