INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "METHOD TO PERFORM IN-SITU VACUUM CONTAMINATION MEASUREMENT AND IDENTIFICATION IN ARBITRARILY LARGE CHAMBERS"

GENEVA, March 25 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2024/045451) for "METHOD TO PERFORM IN-SITU VACUUM CONTAMINATION MEASUREMENT AND IDENTIFICATION IN ARBITRARILY LARGE CHAMBERS" on Sep 06, 2024. With publication no. WO/2025/058929, the details related to the patent application was published on Mar 20, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SANKAR, Santosh Kumar (330 Elan Village LaneUnit 231San Jose, California 95134), SEFA, Makfir (1355 McCandless Dr.Apt. 320Milpitas, California 95035)

Abstract: The system inclu...