INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "METHOD OF FABRICATION AND IMPLEMENTATION OF PROCESS CONDITION MEASUREMENT DEVICE"

GENEVA, Feb. 18 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2024/040922) for "METHOD OF FABRICATION AND IMPLEMENTATION OF PROCESS CONDITION MEASUREMENT DEVICE" on Aug 05, 2024. With publication no. WO/2025/034633, the details related to the patent application was published on Feb 13, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): QULI, Farhat (6065 Monte Verde CourtCastro Valley, California 94552)

Abstract: A process condition measurement device may include a substrate made of a bottom substrate, a spacer, and a cover. The process...