INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "METHOD FOR GAS PURITY IMPROVEMENT USING VACUUM SWING ADSORPTION"

GENEVA, Sept. 17 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/018239) for "METHOD FOR GAS PURITY IMPROVEMENT USING VACUUM SWING ADSORPTION" on Mar 04, 2025. With publication no. WO/2025/188682, the details related to the patent application was published on Sep 11, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): VAN HOOMISSEN, William (167 Knightshaven WaySan Jose, California 95111), PATEL, Bhupendra (4505 Stoneyhaven waySan Jose, California 95111), KARNATI, Priyanka (38542 Canyon Heights DrFremont, California 94536)

Abstract: T...