GENEVA, Dec. 24 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/032365) for "METHOD FOR FAST FOCUSING BASED ON FREQUENCY DOMAIN LINNIK INTERFEROMETRY" on Jun 05, 2025. With publication no. WO/2025/259507, the details related to the patent application was published on Dec 18, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SAFRANI, Avner (POB 605, Hermon St. 16Mitzpe Aviv2018700 Misgav)

Abstract: The system may include an imaging subsystem, a focusing subsystem, and a processor. The imaging subsystem includes a light source configure...