INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "MEASUREMENTS OF COMPLEX SEMICONDUCTOR STRUCTURES BASED ON COMPONENT MEASUREMENT SIGNALS"

GENEVA, June 25 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2024/059941) for "MEASUREMENTS OF COMPLEX SEMICONDUCTOR STRUCTURES BASED ON COMPONENT MEASUREMENT SIGNALS" on Dec 13, 2024. With publication no. WO/2025/128935, the details related to the patent application was published on Jun 19, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): TAN, Zhengquan (20306 Clifden WayCupertino, California 95014)

Abstract: Methods and systems for measurements of complex semiconductor structures employing component measurement signals derived from...