GENEVA, July 30 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/011947) for "MACHINE LEARNING BASED SEMICONDUCTOR MEASUREMENT MODELS TRAINED USING HISTORICAL DATA" on Jan 17, 2025. With publication no. WO/2025/155771, the details related to the patent application was published on Jul 24, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): TAN, Zhengquan (20306 Clifden WayCupertino, California 95014)
Abstract:
Methods and systems for using historical measurement data to train a present state, machine learning (ML) based measurement mod...