INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "INTERFEROMETRIC PHASE ERROR CORRECTION USING A NEURAL NETWORK"

GENEVA, Sept. 10 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/015447) for "INTERFEROMETRIC PHASE ERROR CORRECTION USING A NEURAL NETWORK" on Feb 12, 2025. With publication no. WO/2025/183889, the details related to the patent application was published on Sep 04, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): ZHANG, Taishi (#13-07, 89 Yishun Avenue 1Singapore 769134)

Abstract: A workpiece is disposed on a stage in an interferometer. Measurements are taken of the workpiece using the interferometer. An image of a surface of the w...