INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "IMPROVED ULTRA-HIGH SENSITIVITY HYBRID INSPECTION WITH FULL WAFER COVERAGE CAPABILITY"

GENEVA, Oct. 15 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/022634) for "IMPROVED ULTRA-HIGH SENSITIVITY HYBRID INSPECTION WITH FULL WAFER COVERAGE CAPABILITY" on Apr 02, 2025. With publication no. WO/2025/212714, the details related to the patent application was published on Oct 09, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BRODIE, Alan (998 Van Auken CirclePalo Alto, California 94303), MURAY, Lawrence (4011 Paseo GrandeMoraga, California 94556), GERLING, John (655 Sonoma Ave.Livermore, California 94550), SPALLAS, James (1...