INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "IMAGING THOUSANDS OF ELECTRON BEAMS DURING WORKPIECE INSPECTION"

GENEVA, April 8 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2024/045896) for "IMAGING THOUSANDS OF ELECTRON BEAMS DURING WORKPIECE INSPECTION" on Sep 10, 2024. With publication no. WO/2025/071904, the details related to the patent application was published on Apr 03, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): JIANG, Xinrong (2651 South CourtPalo Alto, California 94306), JIANG, Youfei (1190 Fallen Leaf DriveMilpitas, California 95035), GRELLA, Luca (1170 Olympic CourtGilroy, California 95020)

Abstract: Beamlets are generated fr...