GENEVA, Nov. 11 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/024861) for "FEATURE PLACEMENT ERROR (FPE) METROLOGY AND CORRECTION" on Apr 16, 2025. With publication no. WO/2025/230725, the details related to the patent application was published on Nov 06, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): KIM, Jang Sun (1452-1303, 53, Dongtandaerosibeom-gilHwaseong-siGyeonggi-doGyeonggi-do)
Abstract: A system and method for measuring a sample is disclosed. The system may include a metrology sub-system and a controller. The controller...