GENEVA, Feb. 18 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2024/039443) for "DUAL FREQUENCY COMB IMAGING SPECTROSCOPIC ELLIPSOMETER" on Jul 25, 2024. With publication no. WO/2025/034411, the details related to the patent application was published on Feb 13, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): CHANG, Chao (526 Doyle Rd. #1San Jose, California 95129), KIM, Jongjin (587 N Genevieve Ln.San Jose, California 95128), ZIMDARS, David (3839 Highlander Way EAnn Arbor, Michigan 48108)
Abstract:
A measurement system may direct an i...