INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "DIFFRACTION-BASED ILLUMINATION SAMPLING"

GENEVA, June 24 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2024/056439) for "DIFFRACTION-BASED ILLUMINATION SAMPLING" on Nov 18, 2024. With publication no. WO/2025/128288, the details related to the patent application was published on Jun 19, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MELSHEIMER, Florian (Oscar-Jaeger-Str. 16050825 Cologne)

Abstract: An illumination system may include an optical homogenizer to homogenize a beam of light and a grating positioned in a path for the homogenized beam of light, to diffract light fr...