INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "COMBINED ELLIPSOMETRY AND SCATTEROMETRY"

GENEVA, Oct. 6 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/021665) for "COMBINED ELLIPSOMETRY AND SCATTEROMETRY" on Mar 27, 2025. With publication no. WO/2025/207842, the details related to the patent application was published on Oct 02, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): CHEN, Boxue (1245 Ribisi CircleSan Jose, California 95131), CORDOVA, Isvar (125 Connemara WayUnit #62Sunnyvale, California 94087), ZHAO, Qiang (191 Douglas CtMilpitas, California 95035), KIM, Jongjin (587 N Genevieve Ln.San Jose, California 95128), ...