GENEVA, July 10 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2024/059685) for "CALIBRATION FOR IN-PLANE DISTORTION TOOL-TO-TOOL MATCHING" on Dec 12, 2024. With publication no. WO/2025/144610, the details related to the patent application was published on Jul 03, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): GUO, Wenjiang (Blk 694A Woodlands Drive 62, 09-06Singapore 731694), TOH, Chenkoon (Blk 469 Jurong West st41, #10-471Singapore 640469), OWEN, David (510 Avenue DRedondo Beach, California 90277)

Abstract: A shape map can be extra...