INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "ANGLE OF INCIDENCE AND AZIMUTH ANGLE RESOLVED SPECTROSCOPIC ELLIPSOMETRY FOR SEMICONDUCTOR METROLOGY"

GENEVA, March 10 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2024/044105) for "ANGLE OF INCIDENCE AND AZIMUTH ANGLE RESOLVED SPECTROSCOPIC ELLIPSOMETRY FOR SEMICONDUCTOR METROLOGY" on Aug 28, 2024. With publication no. WO/2025/049520, the details related to the patent application was published on Mar 06, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): NATH, Janardan (1929 Trento LoopMilpitas, California 95035), KRISHNAN, Shankar (10723 Pebble PlaceCupertino, California 95014), KASHYAP, Harish (2168 Calle Vista VerdeMilpitas, Californi...