INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "ADAPTIVE AND ROBUST DETECTION OF LARGE DEFECTS AND IMAGE MISALIGNMENT"

GENEVA, Aug. 12 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/013282) for "ADAPTIVE AND ROBUST DETECTION OF LARGE DEFECTS AND IMAGE MISALIGNMENT" on Jan 28, 2025. With publication no. WO/2025/165708, the details related to the patent application was published on Aug 07, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LEE, Hucheng (1159 Kentwood AvenueCupertino, California 95014)

Abstract: Methods and systems for detecting defects on a specimen are provided. One method includes generating one or more statistics for each of multip...