INTERNATIONAL PATENT: ISTEQ GROUP HOLDING B.V. FILES APPLICATION FOR "HIGH BRIGHTNESS LPP EUV LIGHT SOURCE WITH FAST ROTATING TARGET AND METHOD OF COOLING THEREOF"

GENEVA, June 10 -- ISTEQ GROUP HOLDING B.V. (High Tech Campus 95656 AE Eindhoven) filed a patent application (PCT/EP2024/083609) for "HIGH BRIGHTNESS LPP EUV LIGHT SOURCE WITH FAST ROTATING TARGET AND METHOD OF COOLING THEREOF" on Nov 26, 2024. With publication no. WO/2025/114277, the details related to the patent application was published on Jun 05, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): VINOKHODOV, Aleksandr Yurievich (c/o RnD-ISAN, Ltd.Promyshlennaya st., 2B, TroitskMoscow, 108841), IVANOV, Vladimir Vitalievich (c/o RnD-ISAN, Ltd.Promyshlennaya st., 2B, TroitskMoscow, 108841), KO...