INTERNATIONAL PATENT: INTEVAC, INC. FILES APPLICATION FOR "ACTIVELY COOLED ANODE FOR SPUTTERING PROCESSES"

GENEVA, Jan. 29 -- INTEVAC, INC. (3560 Bassett StreetSanta Clara, California 95054) filed a patent application (PCT/US2024/038229) for "ACTIVELY COOLED ANODE FOR SPUTTERING PROCESSES" on Jul 16, 2024. With publication no. WO/2025/019504, the details related to the patent application was published on Jan 23, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MORSE, Patrick (c/o INTEVAC, INC.3560 Bassett StreetSanta Clara, California 95054)

Abstract: A sputtering chamber has a rotating cylindrical sputtering target inside a vacuum enclosure. An anode is positioned next to the target, having an...