GENEVA, Feb. 9 -- HQ-DIELECTRICS GMBH (Dornstadter Weg 9/189160 Dornstadt) filed a patent application (PCT/EP2025/071807) for "PROCESS SYSTEM" on Jul 29, 2025. With publication no. WO/2026/027547, the details related to the patent application was published on Feb 05, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): LERCH, Wilfried (Dornstadter Weg 9/189160 Dornstadt), NIESS, Jurgen (Hohenweg 1389567 Sontheim)
Abstract: The invention relates to a process system for treating substrates, in particular semiconductor substrates, comprising the following: a process chamber housing forming a proces...