GENEVA, April 28 -- GSEC GERMAN SEMICONDUCTOR EQUIPMENT COMPANY GMBH (Fritz-Reichle-Ring 1878315 Radolfzell am Bodensee) filed a patent application (PCT/EP2024/077810) for "DEVICE AND METHOD FOR DRYING AND/OR CLEANING POT-SHAPED HOLLOW BODIES, IN PARTICULAR TRANSPORT CONTAINERS FOR SEMICONDUCTOR WAFERS OR FOR EUV LITHOGRAPHY MASKS" on Oct 02, 2024. With publication no. WO/2025/082751, the details related to the patent application was published on Apr 24, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): REBSTOCK, Lutz (Im Muhlengarten 2c78343 Gaienhofen)
Abstract:
The present invention rela...