INTERNATIONAL PATENT: FESTO SE & CO. KG FILES APPLICATION FOR "MASS FLOW CONTROL VALVE FOR SUPPLYING INERT GAS TO A WAFER CONTAINER"

GENEVA, Oct. 18 -- FESTO SE & CO. KG (Ruiter Strasse 8273734 Esslingen) filed a patent application (PCT/EP2025/059912) for "MASS FLOW CONTROL VALVE FOR SUPPLYING INERT GAS TO A WAFER CONTAINER" on Apr 10, 2025. With publication no. WO/2025/215163, the details related to the patent application was published on Oct 16, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SCHMIDT, Marco (Karlstrasse 5672138 Kirchentellinsfurt), STEMLER, Marcus (Portugieserweg 267147 Forst), VAN DEN BERG, Max (Jozef Israelslaan 6-23443 CS Woerden), STOLZ, Stefan (Richard-Hirschmann Str. 2073728 Esslingen), SCHOLZ, Ar...