GENEVA, Nov. 24 -- EVATEC AG (Hauptstrasse 1a9477 CH-9477 Trubbach) filed a patent application (PCT/EP2025/063302) for "SUBSTRATE TREATMENT APPARATUS AND METHOD" on May 14, 2025. With publication no. WO/2025/238118, the details related to the patent application was published on Nov 20, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): PATSCHEIDER, Jorg (Ruebsteinstrasse 258706 Meilen), KAISER, Simon (Tuefengass 109473 Gams), HARTMANN, Dominik (Bergstrasse 106835 Muntlix)
Abstract: An apparatus and a method for treating a substrate is disclosed. The apparatus comprises a vacuum recipient enclo...