GENEVA, Jan. 7 -- ENTEGRIS, INC. (129 Concord RoadBillerica, Massachusetts 01821) filed a patent application (PCT/US2025/035554) for "TUNGSTEN PRECURSORS FOR DEPOSITION PROCESSES" on Jun 26, 2025. With publication no. WO/2026/006645, the details related to the patent application was published on Jan 02, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): HALBACH, Robert (129 Concord RoadBillerica, Massachusetts 01821), ZHAO, Pei (129 Concord RoadBillerica, Massachusetts 01821), BARBEE, Cameron (129 Concord RoadBillerica, Massachusetts 01821)
Abstract: Compositions are provided. A composition co...