INTERNATIONAL PATENT: ENTEGRIS, INC. FILES APPLICATION FOR "TITANIUM OXIDE-BASED CHEMICAL-MECHANICAL POLISHING COMPOSITION FOR HEAVILY-DOPED BORON SILICON FILMS"

GENEVA, March 18 -- ENTEGRIS, INC. (129 Concord RoadBillerica, Massachusetts 01821) filed a patent application (PCT/US2024/044650) for "TITANIUM OXIDE-BASED CHEMICAL-MECHANICAL POLISHING COMPOSITION FOR HEAVILY-DOPED BORON SILICON FILMS" on Aug 30, 2024. With publication no. WO/2025/054089, the details related to the patent application was published on Mar 13, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): VILLANI-GALE, Alex (129 Concord Rd.Billerica, Massachusetts 01821), REISS, Brian (129 Concord Rd.Billerica, Massachusetts 01821), KNAPTON, Elliot (129 Concord Rd.Billerica, Massachusetts ...