INTERNATIONAL PATENT: ENTEGRIS, INC. FILES APPLICATION FOR "SYSTEMS AND METHODS FOR VENTING A RETICLE POD"

GENEVA, Nov. 25 -- ENTEGRIS, INC. (129 Concord RoadBillerica, Massachusetts 01821) filed a patent application (PCT/US2025/029216) for "SYSTEMS AND METHODS FOR VENTING A RETICLE POD" on May 13, 2025. With publication no. WO/2025/240530, the details related to the patent application was published on Nov 20, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): RASCHKE, Russ V. (129 Concord RoadBillerica, Massachusetts 01821)

Abstract: Described are methods and systems for venting a reticle pod held at an interior of a vacuum chamber while maintaining a higher pressure (or "positive" pressure) at th...