INTERNATIONAL PATENT: ENTEGRIS, INC. FILES APPLICATION FOR "SELECTIVE SILICON NITRIDE ETCHING COMPOSITIONS AND RELATED SYSTEMS AND RELATED METHODS"

GENEVA, Dec. 10 -- ENTEGRIS, INC. (129 Concord RoadBillerica, Massachusetts 01821) filed a patent application (PCT/US2025/031415) for "SELECTIVE SILICON NITRIDE ETCHING COMPOSITIONS AND RELATED SYSTEMS AND RELATED METHODS" on May 29, 2025. With publication no. WO/2025/250786, the details related to the patent application was published on Dec 04, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): YEO, Juhee (129 Concord RoadBillerica, Massachusetts 01821), KANG, Yeonhui (129 Concord RoadBillerica, Massachusetts 01821), HONG, SeongJin (129 Concord RoadBillerica, Massachusetts 01821), PARK, Youngh...