INTERNATIONAL PATENT: ENTEGRIS, INC. FILES APPLICATION FOR "SELECTIVE DEPOSITION OF COBALT AND RUTHENIUM AND RELATED STRUCTURES"

GENEVA, Oct. 1 -- ENTEGRIS, INC. (129 Concord RoadBillerica, Massachusetts 01821) filed a patent application (PCT/US2025/018667) for "SELECTIVE DEPOSITION OF COBALT AND RUTHENIUM, AND RELATED STRUCTURES" on Mar 06, 2025. With publication no. WO/2025/198860, the details related to the patent application was published on Sep 25, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): ZHENG, Jun-Fei (129 Concord Rd.Billerica, Massachusetts 01821), BESSER, Paul (129 Concord Rd.Billerica, Massachusetts 01821), CHEN, Philip S. H. (129 Concord Rd.Billerica, Massachusetts 01821)

Abstract: Described are met...