INTERNATIONAL PATENT: ENTEGRIS, INC. FILES APPLICATION FOR "RETICLE POD WITH AIR FLOW MANAGEMENT FEATURE"

GENEVA, May 19 -- ENTEGRIS, INC. (129 Concord RoadBillerica, Massachusetts 01821) filed a patent application (PCT/US2024/055261) for "RETICLE POD WITH AIR FLOW MANAGEMENT FEATURE" on Nov 08, 2024. With publication no. WO/2025/101999, the details related to the patent application was published on May 15, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): RASCHKE, Russ V. (129 Concord RoadBillerica, Massachusetts 01821), WANG, Huaping (129 Concord RoadBillerica, Massachusetts 01821)

Abstract: Substrate containers include a deformable surface configured to deflect into an internal space so as t...